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Coating Machine High Vacuum Pumps, KF40 Outlet Flange Ceramic Bearing Type Pump

Categories Vacuum Pumps
Brand Name: ROYAL
Model Number: RT-TPG200/1300
Certification: ISO
Place of Origin: MADE IN CHINA
MOQ: 1
Price: negotiable
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 200 SETS/MONTH
Delivery Time: 1 week
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
name: high Vacuum Pumps
certufucation: ISO
Bearing Type: Ceramic
feature: lightweight
application: PVD coating machine
Outlet Flange: KF40
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    • Product Details
    • Company Profile

    Coating Machine High Vacuum Pumps, KF40 Outlet Flange Ceramic Bearing Type Pump

    High Vacuum Turbo Molecular Pump - Grease Lubrication-TPG200/1300

    Typical Applications:

    High Vacuum Turbo Molecular pumps are widely used in various of

    1. PVD and CVD coating systems: Optical coating machine, hard coatings, Tool coating machine; magnetron and arc plating machines; ITO, LED, OLED coating system;

    2. R&D applications:

    Science and engineering
    Space simulation
    Particle accelerator technology
    Material analysis
    Renewable energies
    Plasma technology

    3. Semiconductor, Lithography, Metrology , CVD, PVD, Etching, Ion implanter.
    4. Other industries like: Metallurgy
    Auto leakage detecting
    Appliance industry leakage detecting
    Energy storage and transport leakage detecting
    Cryogenic vessels
    Chemical process
    Vacuum drying
    Vacuum exhausting
    Vacuum furnace
    Electron beam welding
    Medical instrument and equipment

    RT-TPG200/1300Turbomolecular Pump Technical Data

    Pumping Speed(L/S)1300
    Inlet FlangeDN200 ISO-K, DN200CF
    Outlet FlangeKF40 (DN)
    Compression RationN2, 109 ; H2: 6x103
    Ultimate Vacuum (Torr)≤4.5x10-8 (DN200 ISO-K) ≤4.5x10-9(DN200CF)
    Ultimate Vacuum (Pa)≤6x10-6 (DN200 ISO-K) ≤6x10-7(DN200CF)
    Ration Speed (rpm)24000
    Run-up Time (min)<6
    Bearing TypeCeramic
    Backing Pump (L/S)15-18
    Cooling MethodWater (Air for optional)
    Cooling Water Temp.(℃)≤25
    Bake-out Temp.(℃)≤100
    Ambient Temp.(℃)5~40
    Mounting directionAny
    Weight (lb / kg)64 /19

    RT-TPG200/1300 Pumping Speed

    RT-TPG200/1300 Dimensions

    Please contact us for your applications, we are honored to serve you with our excellent service and quality.

    Product Tags:

    turbo molecular pumps


    high vacuum pump

    Quality Coating Machine High Vacuum Pumps, KF40 Outlet Flange Ceramic Bearing Type Pump for sale
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